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Process used in an RF coupled plasma reactor

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Processing low dielectric constant materials for high speed elec

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...
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Processing method for conservation of processing gases

Etching a substrate: processes – Gas phase etching of substrate
Reexamination Certificate

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Processing method for glass substrate, processed glass...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Processing method for glass substrate, processed glass...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Production of clean, well-ordered CdTe surfaces using laser abla

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Promotion of the adhesion of fluorocarbon films

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Protection of dielectric window in inductively coupled...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Pulsed plasma processing method and apparatus

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Purged lower liner

Etching a substrate: processes – Gas phase etching of substrate
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