4. Etching a substrate: processes
  5. Gas phase etching of substrate
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Etching process for micromachining materials and devices...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Etching pyroelectric devices post ion milling

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Patent

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Exhaust assembly for plasma processing system and method

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Exhausting method and means in a dry etching apparatus

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Exposure head, exposure apparatus, and application thereof

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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