Methods for implementing highly efficient plasma traps
Methods for removing black silicon and black silicon carbide...
Methods for removing rhodium- and iridium-containing films
Methods of generating plasma, of etching an organic material...
Microfluidic systems with embedded materials and structures...
Microlens forming method
Microwave plasma discharge device
Microwave plasma processing method and apparatus
Minimizing arcing in a plasma processing chamber
Mitigation of radiation induced surface contamination
Molecular layers covalently bonded to silicon surfaces
Multi-electrode plasma processing apparatus
Multi-phase DC plasma processing system
Multi-temperature processing
Multibeam laser servowriting of magnetic data storage media
Multibeam laser servowriting of magnetic data storage media
Multilayer microstructures and laser based method for...
Multiple stage process for cleaning process chambers