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Electrostatic chuck including a heater mechanism

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Electrostatic chuck loading

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Electrostatic chuck member and method of producing the same

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck member having an alumina-titania spray coate

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Electrostatic chuck of semiconductor fabrication equipment...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck plate

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Electrostatic chuck structure for semiconductor...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck support mechanism, support stand device...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck usable in high density plasma

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Electrostatic chuck usable in high density plasma

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck using A.C. field excitation

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Electrostatic chuck with ceramic pole protection

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Electrostatic chuck with conformal insulator film

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Electrostatic chuck with diamond coating

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Electrostatic chuck with fluid flow regulator

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Electrostatic chuck with heater

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Electrostatic chuck with improved erosion resistance

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Electrostatic chuck with improved erosion resistance

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Electrostatic chuck with improved release

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Electrostatic chuck with improved temperature control and...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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