Capacitive element driving apparatus
Cascaded gate-driven ESD clamp
Casimir effect conversion
Cathode assembly containing an electrostatic chuck for...
Ceramic electrostatic chuck
Ceramic electrostatic chuck and method
Ceramic electrostatic chuck and method of fabricating same
Ceramic electrostatic chuck assembly and method of making
Ceramic electrostatic chuck with built-in heater
Ceramic electrostatic chuck with built-in heater
Ceramic electrostatic chuck with built-in heater
Ceramic member-electric power supply connector coupling structur
Characterization, modeling, and design of an electrostatic chuck
Characterization, modeling, and design of an electrostatic chuck
Charge build-up and decay monitor
Charged particle beam application system
Chuck equipment
Chuck for substrate processing and method for depositing a film
Chuck having pressurized zones of heat transfer gas
Chuck, lithographic apparatus and device manufacturing method