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Particle trap

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Particle trap for electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Particle trap for electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Pedestal assembly with enhanced thermal conductivity

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Perimeter seal for backside cooling of substrates

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Personal defense device

Electricity: electrical systems and devices – Electric charge generating or conducting means – For application to living beings
Reexamination Certificate

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Personal defense device

Electricity: electrical systems and devices – Electric charge generating or conducting means – For application to living beings
Reexamination Certificate

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Piezoelectric anion generator controled by integrated circuit

Electricity: electrical systems and devices – Electric charge generating or conducting means – Modification of environmental electric charge
Reexamination Certificate

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Pin lift chuck assembly for warped substrates

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Plasma chamber wafer clamping ring with erosion resistive tips

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Plasma generating method and apparatus

Electricity: electrical systems and devices – Electric charge generating or conducting means – With specific power supply
Patent

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Plasma processing apparatus and method of suppressing...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Plasma processing apparatus for processing semiconductor...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Plasma processing method and plasma processing apparatus

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Plasma processing system ESC high voltage control and...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Platen for semiconductor workpieces

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Poling machine for continuous film of pyroelectric and/or piezoe

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Polyceramic e-chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Polymer chuck with heater and method of manufacture

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Portable air ionizer, interface for a portable ionizer, and...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Modification of environmental electric charge
Reexamination Certificate

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