Electrostatic chuck plate

Details Electrostatic chuck plate Electrostatic chuck plate

1982-09-29

1984-10-30

Eisenzopf, Reinhard J.

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

361230, H01F 1302

Patent

active

044802846

ABSTRACT:
An electrostatic chuck plate comprises an electrode plate made of electrically conductive material and a dielectric layer formed on one surface of the electrode plate by flame-spraying dielectric material. The surface region of the dielectric layer is impregnated with plastic material, and the surface of the dielectric layer is smooth and flat. A sample is electrostatically attracted toward the electrode plate and is thus held on the smooth and flat surface of the dielectric layer.

REFERENCES:
patent: 3197682 (1965-07-01), Klass et al.
patent: 3253200 (1966-05-01), Klass et al.
patent: 3330252 (1967-07-01), Oberg

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