Electrostatic chuck with ceramic pole protection

Details Electrostatic chuck with ceramic pole protection Electrostatic chuck with ceramic pole protection

1998-04-12

1999-05-18

Fleming, Fritz

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

279128, H02N13/00

Patent

active

059056266

ABSTRACT:
Electrostatic chucks are disclosed in which a conductive pole piece is provided with a flat top surface, sidewall and a perimeter with radiused corners connecting the top surface to the sidewall. The perimeter and sidewall are coated with a ceramic insulative material covering the radiused corners. The top surface is coated with a ceramic semiconductive material. Then the surfaces of the pole piece not covered by ceramic material are anodized in such a manner that the intersections between anodized pole surfaces and ceramic material are below the pole piece top surfaces.

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