Electrostatic chuck member having an alumina-titania spray coate

Details Electrostatic chuck member having an alumina-titania spray coate Electrostatic chuck member having an alumina-titania spray coate

1996-08-12

1999-06-01

Fleming, Fritz

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

279128, H02N 1300

Patent

active

059093544

ABSTRACT:
An electrostatic chuck member includes a metal substrate, an undercoat of a metallic spray-coated layer and a topcoat of Al.sub.2 O.sub.3 TiO.sub.2 based spray-coated layer containing a Ti.sub.n O.sub.2n-1, where n=1-9, compound. The electrostatic chuck member has a large volume resistivity, a small scattering, and the quality is stable. A method for making the electrostatic chuck member includes subjecting a metal substrate to a blast treatment, spray-coating a metallic undercoat on a surface of the metal substrate, and spray-coating Al.sub.2 O.sub.3 TiO.sub.2 on to the metallic undercoat to form a Al.sub.2 O.sub.3 -TiO.sub.2 based layer in which at least a portion of the TiO.sub.2 is changed into Ti.sub.n O.sub.2, where n=1-9.

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