Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent
1995-07-18
1999-03-16
Fleming, Fritz
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
279128, H02N 1300
Patent
active
058837787
ABSTRACT:
An electrostatic chuck 20 of the present invention is capable of maintaining substantially uniform temperatures across a substrate 30. The chuck 20 comprises an electrostatic member 35 that includes (i) an insulator 45 covering an electrode 40, (ii) a substantially planar and conformal contact surface 50 capable of conforming to a substrate 30, and (iii) conduits 105 terminating at the contact surface 50 for providing heat transfer fluid to the contact surface 50. Application of a voltage to the electrode 40 of the electrostatic member 35 electrostatically holds the substrate 30 on the conformal contact surface 50 to define an outer periphery 110 having (1) leaking portions 115 where heat transfer fluid leaks out, and (2) sealed portions 130 where heat transfer fluid substantially does not leak out. A fluid flow regulator 135 is provided for flowing heat transfer fluid at different flow rates through the conduits 105 in the electrostatic member 35 to provide (i) first flow rates of heat transfer fluid through the conduits 105 adjacent to the sealed portions 130 of the outer periphery 110 of the electrostatic member 35, and (ii) second flow rates of heat transfer fluid through the conduits 105 adjacent to the leaking portions 115, the second flow rates being higher than the first flow rates, to maintain substantially uniform temperatures across the substrate 30 held on the chuck 20.
REFERENCES:
patent: H1145 (1993-03-01), Anderson
patent: 4512391 (1985-04-01), Harra
patent: 4567938 (1986-02-01), Turner
patent: 4603466 (1986-08-01), Morley
patent: 4615764 (1986-10-01), Bobbio et al.
patent: 4628991 (1986-12-01), Hsiao et al.
patent: 4724510 (1988-02-01), Wicker et al.
patent: 4771730 (1988-09-01), Tezuka
patent: 4807016 (1989-02-01), Douglas
patent: 4909314 (1990-03-01), Lamont, Jr.
patent: 5055964 (1991-10-01), Logan et al.
patent: 5099571 (1992-03-01), Logan et al.
patent: 5115858 (1992-05-01), Fitch et al.
patent: 5155652 (1992-10-01), Logan et al.
patent: 5181556 (1993-01-01), Hughes
patent: 5203401 (1993-04-01), Hamburgen et al.
patent: 5207437 (1993-05-01), Barnes et al.
patent: 5213349 (1993-05-01), Elliott
patent: 5230741 (1993-07-01), van de Ven et al.
patent: 5252132 (1993-10-01), Oda et al.
patent: 5252850 (1993-10-01), Schempp
patent: 5255153 (1993-10-01), Nozawa et al.
patent: 5270266 (1993-12-01), Hirano et al.
patent: 5275683 (1994-01-01), Arami et al.
patent: 5280156 (1994-01-01), Niori et al.
patent: 5287914 (1994-02-01), Hughes
patent: 5302209 (1994-04-01), Maeda et al.
patent: 5303938 (1994-04-01), Miller et al.
patent: 5312509 (1994-05-01), Eschbach
patent: 5315473 (1994-05-01), Collins et al.
patent: 5345999 (1994-09-01), Hosokawa
patent: 5350479 (1994-09-01), Collins et al.
patent: 5356476 (1994-10-01), Foster et al.
patent: 5382311 (1995-01-01), Ishikawa et al.
patent: 5384682 (1995-01-01), Watanabe et al.
patent: 5423936 (1995-06-01), Tomita et al.
patent: 5426558 (1995-06-01), Sherman
patent: 5445709 (1995-08-01), Kojima et al.
patent: 5452510 (1995-09-01), Barnes et al.
patent: 5539179 (1996-07-01), Nozawa et al.
patent: 5539609 (1996-07-01), Collins et al.
patent: 5542559 (1996-08-01), Kawakami et al.
patent: 5634266 (1997-06-01), Sherstinsky et al.
patent: 5656093 (1997-08-01), Burkhart et al.
patent: 5671117 (1997-09-01), Sherstinsky et al.
Communication, European Search Report, dated Oct. 31, 1996.
Birang Manoocher
Cameron John F.
Mak Alfred
Ryan Robert E.
Shamouilian Shamouil
Applied Materials Inc.
Fleming Fritz
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