Electrostatic chuck with diamond coating

Details Electrostatic chuck with diamond coating Electrostatic chuck with diamond coating

1991-01-31

1992-11-24

Gaffin, Jeffrey A.

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

269 8, 269903, 279128, 361232, H02N 1300

Patent

active

051668564

ABSTRACT:
An electrostatic chuck includes a body of refractory metal, preferably molybdenum, sized to support a semiconductor wafer. A first layer of diamond having a thickness in the range of 0.1-5.0 microns coats the refractory metal body. A pair of generally planar electrodes, preferably formed by molybdenum, are disposed on the first layer of diamond. A second layer of diamond, of like thickness as the first layer, conformally coats the pair of electrodes. A dc voltage applied across the pair of electrodes develops an electrostatic force to hold the wafer against the second diamond layer.

REFERENCES:
patent: 4184188 (1980-01-01), Briglia
patent: 4384918 (1983-05-01), Abe
patent: 4502094 (1985-02-01), Lewin et al.
patent: 4554611 (1985-11-01), Lewin
patent: 4645218 (1987-02-01), Ooshio et al.
patent: 4665463 (1987-05-01), Ward et al.
patent: 4724510 (1988-02-01), Wicker et al.
patent: 4831212 (1989-05-01), Ogata et al.
patent: 4962836 (1990-10-01), Martin
patent: 5055964 (1991-10-01), Logan et al.

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