Micro electro mechanical system using comb and parallel...

Micro mechanical component and production process thereof

Micro motors and method for their fabrication

Micro oscillating comb tooth element with two interesecting...

Micro oscillating element

Micro-actuator

Micro-actuator array, micro-actuator device, optical switch,...

Micro-actuator utilizing electrostatic and Lorentz forces,...

Micro-actuator with interdigitated combs perpendicular to a...

Micro-electrical-mechanical system (MEMS) device having a...

Micro-electro mechanical system using snapping tabs, comb...

Micro-electro-mechanical-system (MEMS) mirror device having...

Micro-electromechanical structure resonator frequency...

Micro-electromechanical structure resonator, method of...

Micro-electromechanical structure resonator, method of...

Micro-electrostatic motor

Micro-fabricated device with integrated electrostatic actuator

Micro-mirror device with increased mirror tilt

Micro-mirror with rotor structure

Micro-oscillation element having two rotational axes that...