Machine structures fabricated of multiple microstructure layers

Marx generator and spark-gap assembly for such a generator

Mechanical meta-materials

Mechanical meta-materials

Mechanically latchable tiltable platform for forming...

MEMS actuator with lower power consumption and lower cost...

MEMS device having a flexure with integral electrostatic...

MEMS device having distance stops

MEMS device with two axes comb drive actuators

MEMS electrostatic actuators with reduced actuation voltage

MEMS micro-translation device with improved linear travel...

MEMS scanner with dual magnetic and capacitive drive

Method and apparatus for actuation of a two-axis MEMS device...

Method and apparatus for an actuator system with integrated...

Method and apparatus for filtering signals utilizing a...

Method and apparatus for generating a signal having at least...

Method and apparatus for selecting at least one desired...

Method and apparatus for upconverting and filtering an...

Method and circuit for the control of large arrays of...

Method and structure for an out-of-plane compliant micro...