Capacitive micromachined ultrasonic transducer array with...
Centipede actuator motion stage
Charge screening in electrostatically driven devices
Charged rotor pole micromachine motor
Comb-shaped actuator with off centered electrodes
Compact electrostatic comb actuator
Complementary electrostatic driving apparatus for microactuator
Compliant bistable micromechanism
Compound stage MEM actuator suspended for multidimensional motio
Compounded AC driving signal for increased reliability and...
Contact-charge motor and generator
Cooling microfan arrangements and process