2-D actuator and manufacturing method thereof

3-1 mode capacitive membrane ultrasound transducer

Actuator

Actuator

Actuator

Actuator

Actuator adopting the principle of electrostatic induction

Actuator and method of manufacture

Actuator capable of driving with large rotational angle or...

Actuator driving system in which a drive voltage and number...

Actuator having deflected fixed comb electrodes and movable...

Actuator having organic molecular layers

Actuator using comb-tooth

Actuator with a flexure arrangement to accommodate a long...

Actuator with Alternating Steady Voltage Combs and Variable...

Actuator with symmetric positioning

Actuator, image projection apparatus and production method...

Antistatic mechanism of an electrostatic actuator

Apparatus and method for charge neutral micro-machine control

Apparatus comprising an array of tightly spaced rotatable...