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Parallel plate electrostatic actuation of MEMS mirrors

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Reexamination Certificate

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Parametric resonator and filter using the same

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
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Piezoelectric and electrostatic microelectromechanical...

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
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Piezoelectric driven type vibratory feeder

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
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Piezoelectric driving type MEMS apparatus

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
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Piezoelectric-driven MEMS device and method for...

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
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Planar micro-actuator

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Patent

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Pleated sheet microelectromechanical transducer

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Patent

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Polymer microactuator array with macroscopic force and...

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
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Polymer microactuator array with macroscopic force and...

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
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Porous gas reservoir electrostatic transducer

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Patent

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Precision electrostatic actuation and positioning

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
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