Parallel plate electrostatic actuation of MEMS mirrors
Parametric resonator and filter using the same
Piezoelectric and electrostatic microelectromechanical...
Piezoelectric driven type vibratory feeder
Piezoelectric driving type MEMS apparatus
Piezoelectric-driven MEMS device and method for...
Planar micro-actuator
Pleated sheet microelectromechanical transducer
Polymer microactuator array with macroscopic force and...
Polymer microactuator array with macroscopic force and...
Porous gas reservoir electrostatic transducer
Precision electrostatic actuation and positioning