Micro-electro mechanical system using snapping tabs, comb...

Details Micro-electro mechanical system using snapping tabs, comb... Micro-electro mechanical system using snapping tabs, comb...

2011-07-26

2011-07-26

Leung, Quyen (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

C310S308000, C310S310000, C359S872000

Reexamination Certificate

active

07986073

ABSTRACT:
The present invention combines electrostatic comb with parallel plate actuation in a novel design to create a robust low voltage MEMS Micromirror. Other unique advantages of the invention include the ability to close the comb fingers for additional reliability and protection during mirror snapping with over voltage.

REFERENCES:
patent: 2005/0017598 (2005-01-01), Zettl et al.
patent: 2005/0036196 (2005-02-01), Barnea et al.
patent: 2005/0156482 (2005-07-01), Greywall
patent: 2005/0179338 (2005-08-01), Tamura
patent: 2005/0269898 (2005-12-01), Miller et al.
patent: 2006/0082250 (2006-04-01), Ko et al.
patent: 2006/0198012 (2006-09-01), Noh et al.
patent: 2006/0284514 (2006-12-01), Ko et al.
patent: 2007/0001542 (2007-01-01), Neidrich

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