Micro-actuator utilizing electrostatic and Lorentz forces,...

Details Micro-actuator utilizing electrostatic and Lorentz forces,... Micro-actuator utilizing electrostatic and Lorentz forces,...

2005-08-30

2005-08-30

Tamai, Karl (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

C385S018000, C359S223100

Reexamination Certificate

active

06936950

ABSTRACT:
The movable part21is fastened to the substrate11via flexure parts27aand27b,and can move upward and downward with respect to the substrate11.The substrate11also serves as a fixed electrode. The movable part21has second electrode parts23aand23bwhich can generate an electrostatic force between these electrode parts and the substrate11by means of a voltage that is applied across these electrode parts and the substrate11,and a current path25which is disposed in a magnetic field, and which generates a Lorentz force when a current is passed through this current path. A mirror12which advances into and withdraws from the light path is disposed on the movable part21.As a result, the mobility range of the movable part can be broadened, and the power consumption can be reduced, without applying a high voltage or sacrificing small size.

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patent: 6198565 (2001-03-01), Iseki et al.
patent: 6381381 (2002-04-01), Takeda et al.
patent: 6658177 (2003-12-01), Chertkow
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patent: 03/024864 (2003-03-01), None

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