Micro-mirror with rotor structure

Details Micro-mirror with rotor structure Micro-mirror with rotor structure

2006-11-14

2006-11-14

Phan, James (Department: 2872)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

C310S309000, C359S198100, C359S199200, C359S224200

Reexamination Certificate

active

07135804

ABSTRACT:
A micro-mirror device includes a stator structure having a set of radial stator electrodes, a rotor structure having a set of radial rotor electrodes, a mirror mounted on the rotor structure, and a flexure structure suspending the rotor structure relative to the stator structure.

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P.M. Hagelin, U. Krishnamoorthy, R. Conant, R.S. Muller, K.Y. Lau, O. Solgaard, “Integrated Micromachined Scanning Display Systems,” Technical Digest of the 18th Congress of the Int'l Commission for Optics (ICO XVIII), San Francisco, Calif., Aug. 1999, pp. 472-473.

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