Semiconductor microactuator with an improved platform...

Shock-resistant, electrostatically actuated pick-up for optical

Single stage microactuator for multi-dimensional actuation

Single stage microactuator for multidimensional actuation...

Slider displacement direction conversion mechanism in...

Solid state transducer for converting between an electrical...

Spiral wound transducer

Split spring providing multiple electrical leads for MEMS...

Stable electro-mechanical comb drive actuators

Stepping actuator and method of manufacture therefore

Stress release mechanism in MEMS device and method of making...

Structure containing organic molecular layer and use thereof

Supporting insulating column of high voltage accelerator

Switching arrangement for a radiation guide

Systems and methods for improved control of...