Micro electro mechanical system using comb and parallel...

Details Micro electro mechanical system using comb and parallel... Micro electro mechanical system using comb and parallel...

2011-01-04

2011-01-04

Leung, Quyen (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

C310S308000, C310S310000, C359S872000

Reexamination Certificate

active

07863799

ABSTRACT:
The present invention combines electrostatic comb with parallel plate actuation in a novel design to create a robust low voltage MEMS Micromirror. Other unique advantages of the invention include the ability to close the comb fingers for additional reliability and protection during mirror snapping with over voltage.

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