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Flexure with integral electrostatic actuator

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Reexamination Certificate

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Freestanding polymer MEMS structures with anti stiction

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Reexamination Certificate

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Frequency sensitivity analysis and optimum design for MEMS...

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Reexamination Certificate

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