Micro-fabricated device with integrated electrostatic actuator

Details Micro-fabricated device with integrated electrostatic actuator Micro-fabricated device with integrated electrostatic actuator

1996-08-13

1998-09-01

LaBalle, Clayton E.

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

250309, H02N 100, G01N 2300

Patent

active

058014721

ABSTRACT:
A device according to the present invention is a miniaturized efficient device wherein electromechanical transduction is enabled and which is provided with at least an integrated electrostatic actuator provide with an actuator in which a fixed portion and a movable portion are opposite, a plurality of which are arranged and the relative amount of movement of which is controlled by controlling electrostatic force operating between both, the movable portion moved by the integrated electrostatic actuator and a portion connected to the movable portion which can be operated mechanically. The probe of a scanning probe microscope is provided to the movable portion of the above actuator. The above transducer is provided with the structure in which a large number of such actuators are arranged two- or one-dimensionally.

REFERENCES:
patent: 5055731 (1991-10-01), Nihei et al.
patent: 5235187 (1993-08-01), Arney et al.
patent: 5396066 (1995-03-01), Ikeda et al.
patent: 5428259 (1995-06-01), Suzuki
patent: 5431055 (1995-07-01), Takata et al.
patent: 5536988 (1996-07-01), Zhang et al.
patent: 5576483 (1996-11-01), Bonin
patent: 5631514 (1997-05-01), Garcia et al.
"Atomic and Molecular Manipulation with the Scanning Tunneling Microscope" by Joseph A. Stroxcio, et al, pp. 1319-1326 (1991).
"Surface Studies by Scanning Tunneling Microscopy" by G. Binning, et al pp. 57-61 (1982).
"Fabrication of 0.1 pm metal oxide semiconductor field-effect transistors with the atomic force microscope" by S.C. Minne, et al pp. 703-705 (1995).

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