Micro-electrical-mechanical system (MEMS) device having a...

Details Micro-electrical-mechanical system (MEMS) device having a... Micro-electrical-mechanical system (MEMS) device having a...

2005-03-22

2005-03-22

Tamai, Karl (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

C385S018000, C359S223100, C359S224200

Reexamination Certificate

active

06870300

ABSTRACT:
A micro-electrical-mechanical system (MEMS) device and a method of manufacture therefor. The micro-electrical-mechanical system includes a reflective element and a reflective element actuator located adjacent a perimeter of the reflective element and outside a path of motion of the reflective element.

REFERENCES:
patent: 5729075 (1998-03-01), Strain
patent: 5875271 (1999-02-01), Laughlin
patent: 5920417 (1999-07-01), Johnson
patent: 5959760 (1999-09-01), Yamada et al.
patent: 6657759 (2003-12-01), Muller

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