Micro-actuator array, micro-actuator device, optical switch,...

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating

Reexamination Certificate

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C385S018000

Reexamination Certificate

active

07023124

ABSTRACT:
A microactuator array includes a plurality of first terminals equal in number to a first number, a plurality of second terminals equal in number to a second number, and a plurality of microactuators equal in number to the product of the first number and the second number. Each microactuator comprises a fixed electrode and a movable electrode which is movable with respect to the fixed electrode by electrostatic force. Each first terminal is electrically connected to fixed electrodes of microactuators equal in number to the second number. Each second terminal is electrically connected to movable electrodes of microactuators equal in number to the first number. The first terminals are not connected to any of the second terminals.

REFERENCES:
patent: 4001635 (1977-01-01), D'Auria et al.
patent: 5322258 (1994-06-01), Bosch et al.
patent: 6618518 (2003-09-01), Mahadevan et al.
patent: 2004/0207287 (2004-10-01), Akagawa
patent: A 5-113543 (1993-05-01), None
patent: A 2001-42233 (2001-02-01), None

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