Method for controlling etch uniformity

Method for controlling plasma-generating high frequency...

Method for forming magnetic fields

Method for generating a train of fast electrical pulses and...

Method for generating and maintaining a glow plasma discharge

Method for generating surface plasma

Method for making diamond and apparatus therefor

Method for operating a semiconductor processing apparatus

Method for producing a semiconductor device

Method for removing residual metal-containing polymer...

Method for the production of plasma

Method for toolmatching and troubleshooting a plasma...

Method for toolmatching and troubleshooting a plasma...

Method in a pulsed accelerator for accelerating a magnetized rot

Method of an apparatus for performing circuit-processing,...

Method of and apparatus for igniting a plasma in an r.f. plasma

Method of and apparatus for minimizing plasma instability in an

Method of and arrangement for removing contaminants from a...

Method of control of plasma stream and plasma apparatus

Method of decomposing organic halide