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Sequential chemical vapor deposition

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Silicon dioxide film forming method

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Silicon nitride deposition

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Single substrate processing film forming method

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Single-substrate-processing CVD method of forming film...

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Substrate having uniform tungsten silicide film and method of ma

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Substrate support member with a purge gas channel and pumping sy

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Surface pre-treatment for enhancement of nucleation of high...

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Synthesis of metal oxide and oxynitride

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Synthesis of W-Si-N films by chemical vapor deposition using WF.

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Tantalum amide complexes for depositing tantalum-containing...

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Tantalum amide precursors for deposition of tantalum nitride...

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Tantalum compound, process of producing the same, and material f

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Textile fabric and yarn composed of synthetic fibers,...

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Thermal barrier coating and process therefor

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Titanium nitride and multilayers formed by chemical vapor deposi

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Titanium tantalum nitride silicide layer

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Transient enhanced atomic layer deposition

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Use of integrated polygen deposition and RTP for...

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Vacuum deposition process and apparatus for producing films havi

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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