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Apparatus and method for controlling oscillation output of magne

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Apparatus and method for controlling plasma size and position in

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Apparatus and method for controlling wafer environment...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Apparatus and method for delivering a gas

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Apparatus and method for delivering a gas

Coating apparatus – Gas or vapor deposition
Patent

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Apparatus and method for delivering reagents in vapor form to a

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent

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Apparatus and method for depositing a film

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Apparatus and method for depositing a substance with temperature

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Apparatus and method for depositing large area coatings on...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Apparatus and method for depositing large area coatings on...

Coating apparatus – Gas or vapor deposition – With treating means
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Apparatus and method for depositing low K dielectric materials

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Apparatus and method for depositing material onto a...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Apparatus and method for depositing thin film on wafer using...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Apparatus and method for deposition of thin films

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Apparatus and method for developing latent fingerprints

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Apparatus and method for efficient and compact remote microwave

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Apparatus and method for electrically isolating an electrode...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Apparatus and method for exchanging an atmosphere of spherical o

Coating apparatus – Gas or vapor deposition – Means to coat or impregnate particulate matter
Patent

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Apparatus and method for forming a deposited film by a means...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Apparatus and method for forming a deposited film by means...

Coating apparatus – Gas or vapor deposition – With treating means
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