Apparatus for supporting a substrate in a reaction chamber
Apparatus for the coating of substrates in a vacuum chamber
Apparatus for thin film growth
Apparatus for transferring a wafer
Apparatus for vapor deposition
Apparatus for vapor-phase growth
Apparatus for weighting a diffusion furnace cantilever
Arrangement comprising a support body and a substrate holder...
Arrangement for transporting a flat substrate in a vacuum...
Auto-centering device for mechanical clamp