Showerhead electrodes and showerhead electrode assemblies...

Showerhead for uniform distribution of process gas

Silicon carbide composite article particularly useful for plasma

Silicon carbide constant voltage gradient gas feedthrough

Silicon carbide film forming apparatus

Silicon carbide gas distribution plate and RF electrode for...

Silicon deposition reactor apparatus

Silylation treatment unit and method

Simultaneous discharge device

Single wafer LPCVD apparatus

Single-substrate-processing apparatus for semiconductor process

Single-substrate-processing apparatus for semiconductor process

Single-substrate-processing apparatus in semiconductor processin

Single-wafer heat-treatment apparatus and method of manufacturin

Slotted antenna waveguide plasma source

Spiral hollow cathode

Sputtering apparatus

Stabilized oscillator circuit for plasma density measurement

Strength coil for ionized copper plasma deposition

Structure and method for incorporating an inductively coupled pl