Simultaneous discharge device

Details Simultaneous discharge device Simultaneous discharge device

1997-05-14

1999-07-13

Breneman, Bruce

Coating apparatus

Gas or vapor deposition

With treating means

118723E, 156345, C23C 1600

Patent

active

059221348

ABSTRACT:
In a simultaneous discharge device for discharging inside of two chambers 4, 14 simultaneously by a single high-frequency power supply P, electric power dividing means 20 connects high-frequency power supply P to two chambers 4, 14, wherein electric power dividing means 20 comprises a first conductor plate 21 which connects the respective electrodes of the two chambers 4,14, a second conductor plate 23 which connects to the end of Rf cables 22 in said high-frequency power supply P and a conductor bar 24 which connects electrically the first and second conductor plates at a plurality of positions so that an impedance between the power supply and each of the chambers becomes equal.

REFERENCES:
patent: 5534070 (1996-07-01), Okamura et al.
patent: 5540781 (1996-07-01), Yamagami et al.
patent: 5558751 (1996-09-01), Mahler et al.
patent: 5611899 (1997-03-01), Maass
patent: 5643364 (1997-07-01), Zhao et al.
patent: 5753320 (1998-05-01), Mikoshiba et al.

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