Apparatus for heating a substrate in a variable temperature...

Apparatus for igniting low pressure inductively coupled plasma

Apparatus for improved low pressure inductively coupled high...

Apparatus for improved remote microwave plasma source for use wi

Apparatus for improving crystalline thin films with a contoured

Apparatus for improving film stability of halogen-doped...

Apparatus for injecting and modifying gas concentration of a...

Apparatus for internally coating a metal tube

Apparatus for ion beam implantation

Apparatus for large area chemical vapor deposition using...

Apparatus for laser-induced chemical vapor deposition

Apparatus for low pressure chemical vapor deposition

Apparatus for low pressure chemical vapor deposition

Apparatus for low pressure chemical vapor deposition

Apparatus for low pressure chemical vapor deposition

Apparatus for making a plasma coating

Apparatus for making a semiconductor

Apparatus for manufacturing a nitrogen containing compound thin

Apparatus for manufacturing semiconductor and method of manufact

Apparatus for metal organic chemical vapor deposition