Apparatus for improving crystalline thin films with a contoured

Details Apparatus for improving crystalline thin films with a contoured Apparatus for improving crystalline thin films with a contoured

1997-09-19

2000-01-18

Tentoni, Leo B.

Coating apparatus

Gas or vapor deposition

With treating means

118723FE, 118723FI, 359624, 385115, C23C 1648

Patent

active

060149442

ABSTRACT:
A method and apparatus is presented for crystallizing a thin film on a surate by generating a beam of pulsed optical energy, countouring the intensity profile of the beam, and illuminating the thin film with the beam to crystallize the thin film into a single crystal lattice structure.

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