4. Chemistry: electrical and wave energy
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Magnetron sputter source with multipart target

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Magnetron sputter-pulsed laser deposition system and method

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtered boron films and TI/B multilayer structures

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Magnetron sputtered boron films for increasing hardness of a...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Magnetron sputtering

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Magnetron sputtering

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Magnetron sputtering apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtering apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtering apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtering apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtering apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtering apparatus

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
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Magnetron sputtering apparatus

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Magnetron sputtering apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtering apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtering apparatus and mask

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtering apparatus and method

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Magnetron sputtering apparatus and method

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Magnetron sputtering apparatus and process

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Magnetron sputtering apparatus and sputtering gun for use in the

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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