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Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

System and method for performing thin film deposition or...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

System and method for processing workpieces

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

System and method for sputtering silicon films using...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

System and method for transporting and sputter coating a...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

System and method of coating substrates and assembling...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

System for and method of providing a controlled deposition on wa

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

System for depositing a film

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

System for frequency adjustment of piezoelectric resonators...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

System for, and method of, etching a surface on a wafer

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Systems and methods for making a magnetic recording medium on a

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Tailored barrier layer which provides improved copper...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Target and method of optimizing target profile

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Target and process for its production, and method for...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Target and process for its production, and method for...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Target assembly for ion beam sputter deposition with...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Target assembly having inner and outer targets

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Target comprising thickness profiling for an RF magnetron

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Target for reactive sputtering and film-forming method using the

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Target for sputtering and a method for manufacturing a...