Method of sputtering an amorphous carbon overcoat as a protectiv
Method of sputtering copper to fill trenches and vias
Method of sputtering high moment iron nitride based magnetic...
Method of sputtering protective overcoats with improved corrosio
Method of sputtering selected oxides and nitrides for forming ma
Method of synthesizing cubic boron nitride films
Method of texture by in-situ masking and etching for thin film m
Method of treating an article with a plasma apparatus in which a
Method to achieve low and stable ferromagnetic coupling field
Method to deposit multilayer films
Method to eliminate coil sputtering in an ICP source
Method to form alpha phase Ta and its application to IC...
Method to make a wider trailing pole structure by...
Method to reduce overhead time in an ion metal plasma process
Methods and apparatus for detecting reflected neutrals in a sput
Methods and apparatus for generating high-density plasma
Methods and apparatus for ionized metal plasma copper...
Methods and apparatus for magnetron sputtering
Methods and apparatus for physical vapor deposition
Methods and apparatus for preparing low net stress multilayer th