Method of sputtering protective overcoats with improved corrosio

Details Method of sputtering protective overcoats with improved corrosio Method of sputtering protective overcoats with improved corrosio

1998-07-14

1999-11-16

Nguyen, Nam

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

20419212, 20419215, 20429823, 20429827, C23C 1432

Patent

active

059851058

ABSTRACT:
A protective overcoat with improved corrosion resistance is sputter deposited on a magnetic thin film medium to effectively cover and seal the side walls of high aspect ratio roughness features. During sputter deposition, the disk is rotated about a y axis of an x-y plane and spun in the x-y plane while sputtering particles are impinged in a direction substantially along a z-axis perpendicular to the x-y plane. Embodiments include simultaneous or intermittent disk rotation and spinning. The sputtering technique is applicable to depositing corrosion resistance protective overcoats on thin film magnetic recording media and magneto-optical media.

REFERENCES:
patent: 5087340 (1992-02-01), Onagi et al.
patent: 5328583 (1994-07-01), Kameyama et al.
patent: 5482604 (1996-01-01), Ahonen
patent: 5603814 (1997-02-01), Tsutsumi et al.
patent: 5658438 (1997-08-01), Givens et al.
patent: 5718811 (1998-02-01), Chen et al.
patent: 5895712 (1999-04-01), Chen et al.

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