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Method of producing a thin film by sputtering and an opposed tar

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing a thin-film platinum...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing amorphous Co-Tb magnetic recording thin film

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing amorphous silicon for hard mask and...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing an electron beam emission cathode

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing an optical component, and components formed

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing an optical information recording medium

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing electroluminescence emitting film

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing electroluminescence emitting film

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing exchange coupling film and method of...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing flat panels

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing flat panels

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing giant magnetoresistive material film and mag

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing high T.sub.c superconducting NbN films

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing magnetic disc

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing magnetic films of Fe-Si-Al alloy

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing microscopic structure

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing organic light-emitting devices

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing polycrystalline thin film of MgO

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of producing protected thermal head

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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