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Method for processing wafers with in situ gettering

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for producing a decorative gold alloy coating

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for producing a hybrid disk and hybrid disks

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Method for producing a magneto-optical recording medium

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for producing a specified zirconium-silicon amorphous oxi

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for producing an abrasion resistant coated substrate prod

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for producing an Al-containing layer with a planar surfac

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for producing an opaque substrate

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for producing an optical recording medium

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for producing desired tantalum phase

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for producing electrochromic material and electro-optical

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for producing electrode for lithium secondary battery

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for producing magnetic medium

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for producing magnetic recording medium

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for producing metal carbide or carbonitride coating on ce

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for producing NiTiHf alloy films by sputtering

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for producing photovoltaic element

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for producing piezoelectric films with rotating...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for producing silicon oxide film and method for...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for producing thin-film solar cell and equipment for prod

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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