Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1991-10-17
1992-10-20
Nguyen, Nam
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
20419215, 427597, 427331, 427370, C23C 1434
Patent
active
051567253
ABSTRACT:
A process is disclosed for forming a ceramic coating on a substrate. A metal layer is placed onto the substrate by means such as sputtering. After a carbon-containing foil is applied to the metal-coated substrate, it is subjected to rapid omnidirectional compaction. The resulting product is a densified coated ceramic composition which exhibits improved mechanical properties.
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Doktycz Stephen J.
Howard Kevin E.
Goodman K. D.
Howard D. R.
Nguyen Nam
The Dow Chemical Company
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