Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1997-10-30
1999-11-30
Martin, Roland
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
20419212, 2041922, 427250, 4272557, 4272552, C23C 1432, C23C 1600
Patent
active
059936169
ABSTRACT:
This invention provides a method for producing a magneto-optical recording medium with a laminated film composed of a plurality of magnetic layers made of alloys of rare earth metals-transition metals such as a magneto-optical recording medium allowing direct overwriting through light intensity modulation and a magneto-optical recording medium allowing magnetically induced recording with super resolution, or a method for stably producing a magneto-optical recording medium excellent in performance.
The method consists of using, as vaporizers to form the laminated magnetic film, three or more vaporizers including one or more vaporizers containing mainly rare earth elements and one or more vaporizers containing mainly transition metals. Then, particles ejected from a vaporizer containing mainly a rare earth metal and from two or more vaporizers containing mainly transition metals are allowed to continue to impinge onto the surface upon which the laminated film is to be formed, throughout the formation of the laminated film.
REFERENCES:
patent: 4952295 (1990-08-01), Kawabata et al.
patent: 5427671 (1995-06-01), Ahmed
patent: 5536570 (1996-07-01), Osato
patent: 5772856 (1998-06-01), Kawase et al.
Fukushima Yoshihito
Muto Yoshihiro
Suwabe Masatsugu
Cantelmo Gregg
Martin Roland
Sony Corporation
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