Sputtering apparatus having a target backing plate equipped with
Sputtering apparatus of forming thin film
Sputtering apparatus with a magnet array having a geometry for a
Sputtering apparatus with a rotating magnet array having a geome
Sputtering apparatus with isolated coolant and sputtering...
Sputtering apparatus, device for exchanging target and method fo
Sputtering apparatus, method of operating the same, and...
Sputtering assembly and target therefor
Sputtering assembly and target therefor
Sputtering cathode
Sputtering cathode with uniformity compensation
Sputtering device
Sputtering device
Sputtering device
Sputtering device and method for reactive for reactive sputterin
Sputtering device and sputtering method
Sputtering film forming method, electronic device...
Sputtering method and a sputtering apparatus thereof
Sputtering method and apparatus
Sputtering method and apparatus