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Sputtering apparatus having a target backing plate equipped with

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering apparatus of forming thin film

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering apparatus with a magnet array having a geometry for a

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering apparatus with a rotating magnet array having a geome

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering apparatus with isolated coolant and sputtering...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering apparatus, device for exchanging target and method fo

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering apparatus, method of operating the same, and...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering assembly and target therefor

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering assembly and target therefor

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering cathode

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering cathode with uniformity compensation

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering device

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering device

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering device

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering device and method for reactive for reactive sputterin

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering device and sputtering method

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering film forming method, electronic device...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering method and a sputtering apparatus thereof

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering method and apparatus

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering method and apparatus

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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