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Stress tunable tantalum and tantalum nitride films

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Substrate coated with an MgO layer

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Substrate coated with an MGO-layer

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Substrate handling and processing system for flat panel displays

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Substrate processing device and method

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Substrate processing device and method

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Substrate removal as a function of sputtered ions

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Substrate support and lift apparatus and method

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Substrate surface treatment method

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Substrate with photocatalytic coating

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Supplemental heating of deposition tooling shields

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Surface acoustic wave filter employing A1N/A1N:H/A1N tri-layered

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Surface image transfer etching

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Surface modification of fluoropolymers by reactive gas plasmas

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Surface modification of organic materials to improve adhesion

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Surface treatment and method for applying surface treatment...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Surface treatment method

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Surface treatment of polymers

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Surface treatment of polymers

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sustained self-sputtering reactor having an increased...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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