Surface acoustic wave filter employing A1N/A1N:H/A1N tri-layered

Details Surface acoustic wave filter employing A1N/A1N:H/A1N tri-layered Surface acoustic wave filter employing A1N/A1N:H/A1N tri-layered

1997-12-29

2000-08-08

Talbot, Brian K.

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

20419215, 427100, C23C 1432, B05D 512

Patent

active

060997001

ABSTRACT:
The present invention provides a novel surface acoustic wave (SAW) filter having a high propagation velocity and electromechanical coupling coefficient (k.sup.2) employing A1N/A1N:H/A1N tri-layered film where both sides of A1N:H film are deposited with A1N film to protect the film from vapor, and a process for fabricating the same.

REFERENCES:
patent: 4236095 (1980-11-01), Ono et al.
patent: 4567393 (1986-01-01), Asai et al.
patent: 4571519 (1986-02-01), Kawabata et al.
patent: 4749900 (1988-06-01), Hadimioglu et al.
patent: 5936329 (1999-08-01), Shibata et al.
H. Okano et al., "Characteristics of AIN Thin Films Deposited by Electron Cyclotron Resonance Dual-Ion-Beam Sputtering and Their Application to GHz-Bank Surface Acoustic Wave Devices", Jpn. J. Appl. Phys., 33:2957-2961, No Month Available (1994).
H. Nakahata et al., "Theoretical Study on SAW Characteristics of Layered Structures Including a Diamond Layer", IEEE Trans. Ultrason. Ferroelect. Frequen. Control, 42:362-375, No Month Available (1995).
S. Takeda, "Relation Between Optical Property and Crystallinity of ZnO Thin Films Prepared by rf Magnetron Sputtering", J. Appl. Phys., 73:4739-4742, No Month Available (1993).
K. Tsubouchi and N. Mikoshiba, "Zero-Temperature-Coefficient SAW Devices on AIN Epitaxial Films", IEEE Trans. Sonics Ultrason., SU-32:634-644, No Month Available (1985).

Affiliated with

Also associated with

Rating

Surface acoustic wave filter employing A1N/A1N:H/A1N tri-layered does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Surface acoustic wave filter employing A1N/A1N:H/A1N tri-layered, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Surface acoustic wave filter employing A1N/A1N:H/A1N tri-layered will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1146850