Supplemental heating of deposition tooling shields

Details Supplemental heating of deposition tooling shields Supplemental heating of deposition tooling shields

1999-04-08

2000-07-04

Diamond, Alan

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

20429809, 20429811, 20429802, 20419212, 20429803, 20429815, 118723R, 118728, 118641, 118666, 427569, 427570, C23C 1454

Patent

active

060833602

ABSTRACT:
A method of reducing particle generation from the thin coating deposited on the internal surfaces of a deposition chamber which undergoes temperature variation greater than 100.degree. C. comprising maintaining the temperature variation of the internal surfaces low enough during the process cycle to keep thermal expansion stresses between the coating and the surfaces under 500 MPa. For titanium nitride deposited on stainless steel, this means keeping temperature variations under approximately 70.degree. C. in a chamber that may be heated to over 350.degree. C. during a typical processing operation. Preferably, a supplemental heater is mounted behind the upper shield and controlled by a temperature sensitive element which provides feedback control based on the temperature of the upper shield.

REFERENCES:
patent: 5202008 (1993-04-01), Talieh et al.
patent: 5380414 (1995-01-01), Tepman
patent: 5391275 (1995-02-01), Mintz
patent: 5567909 (1996-10-01), Sugarman et al.
patent: 5598622 (1997-02-01), Raijmakers
patent: 5630917 (1997-05-01), Guo
patent: 5690795 (1997-11-01), Rosenstein et al.

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