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Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Plasma processing method and apparatus

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Plasma processing method and apparatus

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Plasma processing method and plasma processing apparatus

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Plasma processing system utilizing combined anode/ ion source

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Plasma sputter etching system with reduced particle contaminatio

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Plasma treating method and apparatus therefor

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Plasma treating method and apparatus therefor

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Plasma treating method and apparatus therefor

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Plasma vapor deposition with coil sputtering

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Plasma vapor deposition with coil sputtering

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Porous getter devices with reduced particle loss and method...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Porous getter devices with reduced particle loss and method...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Powered shield source for high density plasma

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Pre-treatment for salicide process

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Preferential sputtering of insulators from conductive targets

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Preparation method for amorphous superlattice alloys

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Preparation method of palladium alloy composite membrane for...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Preparation of sputtering targets

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Pressure modulation method to obtain improved step coverage...