Preparation method of palladium alloy composite membrane for...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Reexamination Certificate

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Reexamination Certificate

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07875154

ABSTRACT:
Disclosed herein is a method of preparing a palladium alloy composite membrane for hydrogen separation, including (a) providing a first metal coating layer on a porous support using a dry sputtering deposition process; (b) providing a palladium coating layer on the first metal coating layer using a dry sputtering deposition process; and (c) heat treating the palladium coating layer to form an alloy layer of palladium and the first metal.

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