Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1995-03-31
1998-01-20
Kunemund, Robert
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
2041921, 20419215, 20429813, 156 89, 264 61, 264212, C23C 1434, C03B 2900, C04B 3334, B29D 700
Patent
active
057097836
ABSTRACT:
Method for preparing sputtering targets according to one embodiment, by reacting a mixture of alkoxides of metals such as titanium, lanthanum and zirconium, with a soluble lead compound such as lead acetate in an organic solvent in the presence of aqueous ammonium hydroxide, to form a sol-gel. The solvent is removed from the sol-gel to form a powder. The powder is mixed with a liquid medium, e.g. an aqueous medium containing an organosol, to form a slurry of the powder and the slurry is cast on a substrate such as a polyester tape and dried to form a tape of the sol-gel. The tape is cut into individual tapes and the tapes are stacked and laminated under heat and pressure into a monolithic unit, which is then filed at high temperature. The dense monolithic unit thus formed is mechanically machined to the desired shape, e.g. in the form of a circular disc, to produce a sputtering target.
REFERENCES:
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patent: 5091221 (1992-02-01), Chu et al.
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L.E. Sanchez, D.T. Dionk, S.Y. Wu, and I.K. Naik; "Processing And Characterization of Sol-Gel Derived Very Thin Film Ferroelectric Capacitors"; Ferroelectrics, 1991, vol. 116, pp. 1-17.
McDonald Arthur J.
Sanchez Lloyd E.
Kunemund Robert
McDonald Rodney G.
McDonnell Douglas Corporation
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