Sputtering cathode for coating substrates in cathode sputtering
Sputtering cathode on the magnetron principle
Sputtering chamber shield promoting reliable plasma ignition
Sputtering chamber structure for high-frequency bias sputtering
Sputtering chamber with moving table producing orbital...
Sputtering deposition apparatus and method utilizing charged par
Sputtering device
Sputtering device
Sputtering device
Sputtering device
Sputtering device
Sputtering device
Sputtering device
Sputtering device
Sputtering device
Sputtering device
Sputtering device adaptable for coating heat-sensitive substrate
Sputtering device and target with cover to hold cooling fluid
Sputtering device and target with cover to hold cooling fluid
Sputtering device for coating an essentially flat...