Apparatus and method for regional plasma control

Apparatus and methods to remove films on bevel edge and...

Deposition shield for a plasma reactor

Edge electrodes with variable power

Etch rate uniformity

Exposure apparatus and semiconductor device manufacturing...

Focus ring, plasma etching apparatus and plasma etching method

Gas modulation to control edge exclusion in a bevel edge...

Linear drive system for use in a plasma processing system

Method and apparatus for cleaning deposited films from the...

Method and apparatus for photomask plasma etching

Method and apparatus for photomask plasma etching

Method and apparatus for processing nanoscopic structures

Method and apparatus for processing semiconductor substrates

Method and apparatus for processing semiconductor substrates

Method of stabilizing oxide etch and chamber performance...

Plasma processing apparatus and methods for removing...

Shield or ring surrounding semiconductor workpiece in plasma...

System and method for imprint lithography to facilitate dual...